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E09900 - SEMI E99 - キャリアIDリーダ/ライタ機能スタンダード:コンセプト,挙動,およびサービスに関する仕様 StdTpc-undefined This Specification provides information for

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Description

This Specification provides information for developing specifications for silicon annealed wafers used to fabricate semiconductor devices and integrated circuits

SEMI E5-1108 (technical revision)

Originally published September 1998

including handling and packaging

qualified human resources for manufacturing operations

E09900 - SEMI E99 - キャリアIDリーダ/ライタ機能スタンダード:コンセプト,挙動,およびサービスに関する仕様 StdTpc-undefined This Specification provides information forNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI IDIDIDID IDID IDID ID Subordinate Standards (included) SEMI E99 1104 (Reapproved 0710) IDSECS ISECS II Referenced SEMI Standards (purchase separately) SEMI E1. 9 Mechanical Specification for Cassettes Used to Transport and Store 300

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