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The scope of this Document is all grades of methyl ethyl ketone used in the semiconductor industry
SEMI C90-00-0725 (complete rewrite)
but this Guide may also be applied to the facilities and equipment used for manufacturing other related products (e
SEMI F48-0600 (technical revision)
本スタンダードは，global Gases Committeeで技術的に承認されている。現版は2011年5月13日，global Audits and Reviews Subcommitteeにて発行が承認された。2011年6月にwww
F01900 - SEMI F19 - ステンレススチール部品の接ガス・接液面の表面仕上げのための仕様 StdPbc-0619 The scope of this Documentglobal Gases Committee20091216global Audits and Reviews Subcommittee20102www. semi. org1995220043 SEMI F20 Referenced SEMI Standards SEMI F20 Specification for 316L Stainless Steel Bar, Extruded Shapes, Plate, and Investment Castings for Components Used in High Purity Semiconductor Manufacturing Applications SEMI F37 Method for Determination of Surface Roughness Parameters for Gas Distribution System Components SEMI F60 Test Method for ESCA Evaluation