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Purge efficacy with a non-interactive gas using manufacturers’ standard purge sequence
it can be assumed that the term is a noun
It provides three classes of smaller diameter test wafers (through 125 mm)
such as the binning of data
SEMI E5-88 (technical revision)
E04700 - SEMI E47 - Specification for 150 mm/200 mm Pod Handles Revision:SEMI E47-0301 - Superseded Purge efficacy with a non-interactiveNOTICE: This Standard or Safety Guideline has Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1 Purpose 1. 1 This Specification provides a unified form and location for pod handles to enable automatic pod handling. 2 Scope 2. 1 This Specification defines the dimensions and location of handles on 150 mm 200 mm pod.
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